Equipment

The class will be taught in sessions, tuned to their respective area:

Group 1: Lithography, Etch and CMP,

Group 2: Diffusion (Thermal) CVD, PVD, Implant and Wet.

• Critical elements for equipment setup and control to forecasts yield, output, cost.

• Maintenance, recipes, spare parts, process margin, seasoning, insitu clean setup of the equipment,

• Process, materials, metrology and facilities,

• Develop the approved equipment list to ensure equipment is capable of meeting yield requirements, installation, setup and qualification,

• Unique insight of equipment constants that affect yield

• Preventative Maintenance, Components, new spare and refurbished parts

• Process recipe marginality, materials, material specs., material controls

• Process measurements, edge yield sensitivity to variation in yield.